| 摘要 |
<p>PROBLEM TO BE SOLVED: To load a wafer onto a stage flatly.SOLUTION: Shape of a wafer W is measured by entering the measurement light to the back side of the wafer W held by means of a loading disk 121, and receiving the reflection light while scanning the back side of the wafer W, by using a line sensor 142 provided on a measurement stage MST. Consequently, the shape of the wafer W held by means of the loading disk 121 can be measured accurately. The wafer W can be loaded onto a wafer stage WST flatly, by using a loading unit 120 (loading disk 121).</p> |
