| 摘要 |
PROBLEM TO BE SOLVED: To obtain a pyroelectric sensor capable of improving sensor characteristics, and a mounting structure of the pyroelectric sensor. ! SOLUTION: A pyroelectric sensor 10 includes: a dielectric body 60 which has a dielectric thin plate portion 61 formed by an insulation thin film; a pyroelectric element 40 disposed on the dielectric thin plate portion 61; a first electrode 31 disposed on one side of the pyroelectric element 40; and a second electrode 51 disposed on the other side of the pyroelectric element 40. A relationship between stress F1 generated on the dielectric body 60 side of a semiconductor base material 20 and stress F2 generated on the opposite side to the dielectric body 60 of the semiconductor base material 20 is a relationship of warping the dielectric thin plate portion 61 inward. ! COPYRIGHT: (C)2014,JPO&INPIT |
