FORMATION METHOD FOR FERROELECTRIC FILM, FERROELECTRIC FILM, ELECTROMECHANICAL CONVERSION ELEMENT, LIQUID DROP DISCHARGE HEAD, AND IMAGE FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a formation method for obtaining a satisfactory ferroelectric film of crystals.SOLUTION: A formation method for a ferroelectric film comprises: an application step in which a precursor solution is applied; a drying step in which a precursor film is dried by being heated while the temperature is increased at a speed of 10°C/sec or lower to a drying temperature; a heat decomposition, first heating step in which the precursor film is heated while the temperature is increased at a speed of 20°C/sec or lower to a predetermined temperature at which the ferroelectric film characteristics of the ferroelectric film are not affected; a heat decomposition, second heating step in which the precursor film is heated while the temperature is increased at a speed of 50°C/sec or higher to a predetermined heat decomposition temperature; a crystallization, first heating step in which the precursor film is heated while the temperature is increased at a speed of 20°C/sec or lower to a predetermined temperature at which the ferroelectric film characteristics of the ferroelectric film are not affected; a crystallization, second heating process in which the precursor film is heated while the temperature is increased at a speed of 50°C/sec or higher to a predetermined heat decomposition temperature; and a crystallization, third heating step in which the precursor film is heated while the temperature is increased at a speed of 50°C/sec or higher to a predetermined crystallization temperature.