发明名称 PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a processing device including control means in which the events recorded in recording means can be confirmed easily.SOLUTION: A processing device comprises: workpiece holding means for holding a workpiece; processing means for processing a workpiece held by the workpiece holding means; control means for controlling the processing work including the work of the processing means and including recording means for recording the events during the processing in time series; input means for inputting the processing conditions, and the like, to the control means; and display means for displaying the events recorded in the recording means. The control means includes coloring means for distinguishing the events recorded in the recording means from other events by coloring.
申请公布号 JP2014154633(A) 申请公布日期 2014.08.25
申请号 JP20130021435 申请日期 2013.02.06
申请人 DISCO ABRASIVE SYST LTD 发明人 SEKIYA KAZUMA
分类号 H01L21/301 主分类号 H01L21/301
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