| 摘要 |
PROBLEM TO BE SOLVED: To provide a coordinate measuring machine capable of securing sufficient accuracy of measurement even in a structure which cannot satisfy principles of Abbe.SOLUTION: An attitude sensor for detecting an attitude of a moving body is disposed. By taking into account difference between a position where a scale should be read and a position where the scale actually is read to calibrate output of a position sensor, a proper measurement value can be obtained on the basis of output from the attitude sensor. |
