IMPRINTING METHOD AND IMPRINTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an imprinting method capable of preventing damage or the like of a mold and stably manufacturing a high accuracy pattern structure, and an imprinting device.SOLUTION: An imprinting device 1 comprises: at least of a mold holding part 2 for holding a mold; a substrate holding part 4 for holding a transfer substrate; a droplet supply part 6 having an ink jet head 7 discharging droplets of a resin to be molded; and a soft-X ray irradiation type static eraser 8. The static eraser 8 is arranged at a location where the mold can be irradiated with the soft-X ray from a lateral to a holding surface of the mold holding part 2, and has a regulation member 10 directly provided on or separated from the static eraser 8 and for regulating an irradiation direction of the soft-X ray so as to prevent at least of the droplet discharge port of the ink jet head 7 from being irradiated by the soft-X ray emitted from the static eraser 8.