MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF DISILANES

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing apparatus and a manufacturing method of silane compounds capable of realizing a high energy efficiency and of transporting the silane compounds continuously and stably by using means entailing no likelihood of contaminations by external impurities without using special transport means or transport members.SOLUTION: The provided apparatus includes: a reactor 1 into which lower-order silanes are introduced; a cooling unit 2 in which a reaction product is cooled; a purification column 3 in which the reaction product is separated/purified into lower-order silanes and higher-order silanes; a higher-order silane lead-out unit 4 into which the purified higher-order silanes are led out; a cold trap 5 in which the lower-order silanes led out of the purification column 3 are cooled and vapor/liquid-separated; a liquid head unit 6 in which a liquid head is formed by the separated liquid component; a circulatory flow channel 7 through which the liquid component is introduced into the reactor 1 by the liquid head; a control valve 8 configured on the circulatory flow channel 7; and a control unit 9 for controlling the control valve 8 by computing the braking magnitude thereof. The circulatory flow rate of the lower-order silanes transported via the circulatory flow channel 7 is adjusted by the control valve 8.