The present invention discloses a gas sensor and a manufacturing method thereof. The sensor includes: a substrate; a sensing electrode extended in the first direction on the substrate; a plurality of heaters which are separated on both sides of the sensing electrode in the second direction, crossed by the first direction on the substrate. The plurality of heaters may include graphene.
申请公布号
KR20140103015(A)
申请公布日期
2014.08.25
申请号
KR20130101957
申请日期
2013.08.27
申请人
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
发明人
YU, YOUNG JUN;CHOI, HONG KYW;CHOI, JIN SIK;CHUNG, KWANG HYO;KIM, JIN TAE;YOUN, DOO HYEB;CHOI, CHOON GI