| 摘要 |
The present invention relates to a manufacturing method for an optical apparatus, etc. using a vertical nanostructure, which comprises: a step of preparing at least one substrate among a single crystal semiconductor substrate such as Si and Ge, a III-V compound semiconductor substrate such as GaAs and InP, and a silicon on insulator (SOI); a step of patterning a desired vertical nanostructure on the washed substrate using one or more methods between a lithography method and a self-assembly template method; a step of depositing catalyst metal, which includes one among gold, silver, platinum, and two or more combinations thereof, on the upper part of the substrate in a reverse pattern of the vertical nanostructure to be finally completed; and a step of manufacturing the vertical nanostructure using a metal catalyst etching method which is to submerge into a solution where hydrofluoric acid (HF) and hydrogen peroxide (H_2O_2) are mixed. Therefore, the manufacturing method can easily manufacture fine and elaborate patterns by manufacturing a grid structure using the metal catalyst etching method. The optical apparatus with a SWG nanostructure manufactured thereby can provide more effective performance than a structure manufactured by an existing dry etching method. |
