| 摘要 |
PURPOSE: A conveyor module and a substrate processing apparatus using the same are provided to steadily transfer a substrate by mounting a plurality of magnet gears on a driving shaft and rotating a plurality of roll sets in a same direction. CONSTITUTION: A conveyor roll(110) is arranged along a transfer direction of a substrate. The conveyor roll comprises a roller member(112) and a roll shaft member(114). The roller member contacts to the bottom of the substrate. A conveyor driving shaft(120) transfers torque created in a motor(140) to the roll shaft member. A driven magnet gear(130') is mounted on the roll shaft member of the conveyor roll. A driving magnet gear(130) is composed of a magnet holder, a soft magnet, and an external magnet. |
