| 摘要 |
The invention provides a substrate supporting module which comprises the components of: a platform which is used for placement of a substrate whereon; a supporting member which is mounted in a manner that at least one part of the supporting member vertically penetrates through the platform and furthermore the supporting member is configured for loading and unloading the substrate on the platform through lifting and dropping actions; a lower rotating mechanism which is placed in the platform and is provided with a first lower rotating component and a second lower rotating component that are mounted in a manner of opposing each other, wherein the supporting member is placed at the central part between the first lower rotating component and the second rotating component and furthermore the first lower rotating component and the second lower rotating component are configured for abutting against the supporting member and rotating; and a first upper rotating mechanism which is placed above the lower rotating mechanism in the platform and is provided with a first upper rotating component and a second upper rotating component that are mounted in a manner of opposing each other. The supporting member is arranged at the center between the first upper rotating component and the second rotating component for abutting against the supporting member and rotating. |
