| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device in which a gap between a substrate and a piezoelectric vibration piece can be surely and easily set by reducing variation of parasitic impedance, and correction on an integrated circuit side is simplified.SOLUTION: In a piezoelectric device 100 including a piezoelectric vibration piece 1 which is cantilever-supported by firmly fixing one end 1a in a long side direction with an adhesive material 3 so as to maintain a gap d in a facing state on a surface 5a of a substrate 5, and which can persistently vibrate at a unique frequency, spherical spacers 6 mixed in the adhesive material 3 to secure the gap d are provided. The gap d is secured with a diameter D of the spherical spacer 6. The spacer 6 is constituted by coating a surface 6a of an inorganic material or plastic material with the metal of a good conductor. The adhesive material 3 is a thermosetting paste including an epoxy or silicone component and mixed with metal particles 9 having an external dimension Z which is equal to or less than 1/4 of the diameter D of the spherical spacer 6. |
