| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of precisely detecting an angular velocity including a differential amplifier capable of avoiding from getting saturated with unnecessary signals generated excessively.SOLUTION: The angular velocity sensor includes: an angular velocity detection element having a drive electrode and a detection electrode; an excitation drive circuit; and a detection circuit that reads a signal corresponding to the angular velocity from the detection electrode. The detection circuit includes: a differential amplifier that differentially amplifies the read signal; and a synchronous detector that synchronously detects a differential signal output from the differential amplifier based on a signal from the drive circuit. The differential amplifier includes: a first operational amplifier 50; first resistances 51 and 53 connected to the first operational amplifier 50 in parallel to each other; and first switches 52 and 54 that change the resistant value of the first resistances 51 and 53. The synchronous detector includes: a second operational amplifier; a second resistance connected to the input side of the second operational amplifier; and a second switch that changes the resistant value of the second resistance. The angular velocity sensor switches the distribution of the amplification ratio of the differential amplifier and the synchronous detector according to the signal. |
