发明名称 |
METHOD FOR PRODUCING COLOR FILTER, COLOR FILTER PRODUCED USING SAME, SOLID-STATE IMAGING ELEMENT, AND LIQUID CRYSTAL DISPLAY DEVICE |
摘要 |
Provided are: a method that is for producing a color filter and that can increase the rectangularity of a color filter pixel array pattern by means of increasing mask tracking and can increase the likelihood of exposure latitude (mask tracking) and focal depth without loss of throughput; a color filter produced using same; a solid-state imaging element; and a liquid crystal display device. The method for producing a color filter has: a step for exposing a photosensitive colored layer containing a radical polymerizable monomer and a photo-radical initiator using a photomask for a color filter pixel array; and a step for forming the color filter pixel array pattern by means of developing the post-exposure photosensitive colored layer. The exposure is performed split into a plurality of instances in succession at the same coordinates. |
申请公布号 |
WO2014125935(A1) |
申请公布日期 |
2014.08.21 |
申请号 |
WO2014JP52153 |
申请日期 |
2014.01.30 |
申请人 |
FUJIFILM CORPORATION |
发明人 |
YOSHIBAYASHI MITSUJI |
分类号 |
G02B5/20;G02B5/22;G02F1/1335;G03F7/004;G03F7/20;H01L21/027;H01L27/14 |
主分类号 |
G02B5/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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