| 摘要 |
The present invention relates to an apparatus to feed a necessary amount of organic matter to a crucible without releasing a vacuum state during a deposition process of an organic light emitting diode (OLED) thin film. The organic matter feeding apparatus includes: a storage to store the organic matter; a piston horizontally provided inside the storage and being moved by a separate driver to feed the organic matter inside the storage to the crucible; a shutter provided between the storage and the crucible to open/close between the storage and the crucible; an opening/closing unit to open/close the shutter; a divider formed with a plurality of injection nozzles at an upper portion thereof to inject the organic matter; and the crucible to vaporize the organic matter to the divider by heating the organic matter. According to the present invention, a predetermined amount of the organic matter may be supplied into the crucible for a long time with reproducibility without releasing a vacuum state of a vacuum chamber during a deposition process of the thin film and replacing the crucible. Since the organic matter is heated in the crucible before feeding, the supply and deposition may be simultaneously performed. |
