DECOMPRESSION PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a decompression processing apparatus capable of keeping a decompression chamber in a decompressed state when carrying in/out a workpiece to/from the decompression chamber for processing the workpiece.SOLUTION: A decompression processing apparatus comprises: a housing including a first decompression chamber 21 where a workpiece is processed and a second decompression chamber 22 which is partitioned by a partition 23 and communicates to the first decompression chamber via a communication opening 231 provided on the partition; shutter means 3 for opening/closing the communication opening provided on the partition; gate means 4 for opening/closing a workpiece carry-in/out opening which communicates to the second decompression chamber; workpiece holding means 6 arranged in the first decompression chamber so as to hold the workpiece; processing means for processing the workpiece held by the workpiece holding means; first decompression means 51 for decompressing the first decompression chamber; second decompression means 52 for decompressing the second decompression chamber; temporary placement means 8 arranged in the second decompression chamber so as to temporarily place the workpiece; and workpiece conveyance means 9 for conveying the workpiece between the temporary placement means and the workpiece holding means.