发明名称 HEATING TRANSPORTATION APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a heating transportation apparatus which has a relatively simple configuration and allows heating an object to be heated such that temperature distribution of the object to be heated is uniform.SOLUTION: A heating transportation apparatus AP which heats and transports an object to be heated includes a heating member 2 and a transportation part 10. The heating member 2 includes; a heating part 22 having an upper surface 22a and a lower surface 22b; a heat conduction part 21 having a support surface 21a on which the object to be heated is placed, and is disposed on the heating part 22; and a plurality of penetration parts 23 which penetrate from the support surface 21a of the heat conduction part 21 to a lower surface 22b of the heating part 22. The transportation part 10 includes; a rotation body 11 which moves within the penetration parts 23 to contact the object to be heated disposed on the heat conduction part 21 and transports the object to be heated; and a rotation shaft 12 disposed below the heating part 22 and rotates the rotation body 11.
申请公布号 JP2014148712(A) 申请公布日期 2014.08.21
申请号 JP20130017545 申请日期 2013.01.31
申请人 KYOCERA CORP 发明人 MATSUSHIMA NORIHIKO ; INOMATA YOSUKE ; ISHIKAWA SHINYA ; YOKOTA HIROKO ; KISHU ATSUO
分类号 C23C16/46;B65G49/07;C03B35/16;C23C16/44;H01L21/677 主分类号 C23C16/46
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