| 发明名称 |
CHEMICAL SUPPLIER, PROCESSING APPARATUS INCLUDING THE CHEMICAL SUPPLIER |
| 摘要 |
A chemical supplier includes a chemical reservoir containing a chemical mixture at a room temperature, an inner space of the chemical reservoir being separated from surroundings, a supply line through which the chemical mixture is supplied to a process chamber from the chemical reservoir, an inline heater positioned on the supply line and heating the chemical mixture in the supply line to a process temperature, and a power source driving the chemical mixture to move the chemical mixture toward the process chamber. |
| 申请公布号 |
US2014231010(A1) |
申请公布日期 |
2014.08.21 |
| 申请号 |
US201414183994 |
申请日期 |
2014.02.19 |
| 申请人 |
PARK Sang-Jine;YOON Bo-Un;HAN Jeong-Nam;KWON Kee-Sang;YUN Doo-Sung;CHOI Won-Sang |
发明人 |
PARK Sang-Jine;YOON Bo-Un;HAN Jeong-Nam;KWON Kee-Sang;YUN Doo-Sung;CHOI Won-Sang |
| 分类号 |
H01L21/67 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A chemical supplier, comprising:
a chemical reservoir containing a chemical mixture at a room temperature, an inner space of the chemical reservoir being separated from surroundings; a supply line through which the chemical mixture is supplied to a process chamber from the chemical reservoir; an inline heater positioned on the supply line and heating the chemical mixture in the supply line to a process temperature; and a power source driving the chemical mixture to move the chemical mixture toward the process chamber. |
| 地址 |
Yongin-si KR |
