| 摘要 |
Provided is a conveyance system that makes it possible to prevent the erroneous entry of a conveyance carriage. The conveyance system (1) is provided with: a rail (R) that is laid across a plurality of areas; a FOUP conveyance vehicle (10) that travels along the rail (R); a reticle conveyance vehicle (20) having a width and/or height that differs from that of the FOUP conveyance vehicle (10); an optical sensor (15) that is provided to the FOUP conveyance vehicle (10), that is arranged at a position that does not overlap with the travel direction of the reticle conveyance vehicle (20), and that detects obstacles in the forward direction; and a member (30) to be detected that is arranged among a plurality of areas in an entry area leading to a specific area that only the reticle conveyance vehicle (20) is allowed to enter at a position that both allows the reticle conveyance vehicle (20) to enter the specific area and that is detected by the optical sensor (15) that is provided to the FOUP conveyance vehicle (10). |
