| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a liquid crystal display device including a thin film transistor with high electric characteristics and high reliability, and a method of manufacturing the liquid crystal display device with high mass productivity.SOLUTION: In a liquid crystal display device including an inverted staggered thin film transistor of a channel stop type, the inverted staggered thin film transistor of a channel stop type includes a gate electrode, a gate insulating film on the gate electrode, a microcrystalline semiconductor film including a channel formation region on the gate insulating film, a buffer layer on the microcrystalline semiconductor film, a channel protective layer which is formed on the buffer layer so as to overlap with the channel formation region of the microcrystalline semiconductor film, a source region and a drain region on the channel protective layer and the buffer layer, and a source electrode and a drain electrode on the source region and the drain region.</p> |
