| 摘要 |
In a method for producing trichlorosilane according to the present invention, for the purpose of obtaining high-purity trichlorosilane from a mixture (S) of methyldichlorosilane (CH3HSiCl2), tetrachlorosilane (SiCl4) and trichlorosilane (HSiCl3) while removing methyldichlorosilane from the mixture, a procedure is employed in which the chlorine atom redistribution between methyldichlorosilane and tetrachlorosilane is carried out by the treatment with a catalyst to convert into trichlorosilane and methyltrichlorosilane (CH3SiCl3). Methyldichlorosilane (boiling point: 41˚C), which has a boiling point near the boiling point of trichlorosilane (boiling point: 32˚C) to be purified, can be converted into methyltrichlorosilane (boiling point: 66˚C), which has a higher boiling point than that of methyldichlorosilane, by the chlorine atom redistribution between methyldichlorosilane and tetrachlorosilane, in which the removal of impurities can be achieved easily. |
