发明名称 MULTI-AXIAL ACCELERATION SENSOR AND METHOD OF MANUFACTURING THE SAME
摘要 The present invention provides a multi-axial acceleration sensor and a method of manufacturing the multi-axial acceleration sensor. The method includes: providing a substrate having a lead plane; disposing a first sensor chip onto the lead plane, wherein a wire bonding plane of the first sensor chip is perpendicular to the lead plane; and disposing a second sensor chip onto the lead plane, wherein a wire bonding plane of the second sensor chip is in parallel with the lead plane.
申请公布号 US2014231935(A1) 申请公布日期 2014.08.21
申请号 US201313962955 申请日期 2013.08.09
申请人 PixArt Imaging Inc. 发明人 Wang Wei-Chung
分类号 H01L25/00;H01L25/07 主分类号 H01L25/00
代理机构 代理人
主权项 1. A manufacturing method of a multi-axial acceleration sensor, comprising: providing a substrate, wherein the substrate has a lead plane; disposing a first acceleration sensor chip onto the lead plane, wherein a wire bonding plane of the first acceleration sensor chip is perpendicular to the lead plane; and disposing a second acceleration sensor chip onto the lead plane, wherein a wire bonding plane of the second acceleration sensor chip is in parallel with the lead plane.
地址 Hsin-Chu City TW