Layer system used for the determination from properties of the material of functional layers, comprises primary layer having specific crystal orientation, secondary layer with continuous change in composition

摘要

A layer system comprises layer (a) with specific crystal orientation, layer (b) which is epitaxially grown on layer (a) and having continuous change in the composition along lateral direction, and layer (c) which is epitaxially grown on the layer (b). The layer (c) is functional layer. An independent claim is included for manufacture of layer system.