发明名称 |
REPLACEABLE LOCKING INSERT FOR SUSCEPTOR INTERFACE |
摘要 |
<p>In accordance with one version of the invention, there is provided a replaceable, machined graphite locking insert for interfacing with a silicon carbide susceptor. The replaceable insert extends the life of a spindle that interfaces with the silicon carbide susceptor, thereby improving machine reliability and efficiency of production.</p> |
申请公布号 |
WO2014126849(A1) |
申请公布日期 |
2014.08.21 |
申请号 |
WO2014US15568 |
申请日期 |
2014.02.10 |
申请人 |
ENTEGRIS, INC. |
发明人 |
BENDURE, TODD, W.;LOPEZ, OSVALDO, A. |
分类号 |
H01L21/687 |
主分类号 |
H01L21/687 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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