| 摘要 |
PROBLEM TO BE SOLVED: To provide a differential pressure detection element excellent in a symmetry of sensitivity to a pressure application direction.SOLUTION: A differential pressure detection element 10 includes: a cantilever part 12 having piezoresistance layers 121, 122; electrodes 13, 14 electrically connected to the piezoresistance layers 121, 122; and a lower substrate 11 having a first through hole 112 and supporting the cantilever part 12 and the electrodes 13, 14. The cantilever part 12 is cantilevered with the lower substrate 11 so as to protrude to the first through hole 112, the differential pressure detection element 10 also includes a glass member 15 laminated on a principal surface 111 of the lower substrate 11, and the glass member 15 includes a second through hole 151 having substantially the same opening shape as an opening shape of the first through hole 112 and arranged to face the first through hole 112. |
