HOT-WIRE METHOD FOR DEPOSITING SEMICONDUCTOR MATERIAL ON A SUBSTRATE AND DEVICE FOR PERFORMING THE METHOD

摘要

A hot wire device and method for depositing semiconductor material onto a substrate in a deposition chamber in which the ends of at least two filaments are clamped into a filament holder and heated by supplying current, wherein a voltage for generating an electrical current is applied in temporal succession to filaments made of differing materials so that a number of differing semiconductors corresponding to the number of consecutively heated filament materials can be consecutively deposited onto the substrate without opening the chamber.

主权项

1. A hot wire method for depositing semiconductor material onto a substrate in a deposition chamber, comprising clamping the ends of at least two filaments into a filament holder, heating the filaments by supplying current, applying a voltage for generating an electrical current in temporal succession to filaments made of differing materials so that a number of differing semiconductors corresponding to the number of consecutively heated filaments materials can be consecutively deposited onto the substrate without opening the chamber.