MANUFACTURING METHOD OF LIQUID EJECTION HEAD

摘要

A manufacturing method of a liquid ejection head, which includes a step of preparing a substrate including a first layer, a step of forming a flow path mold for forming the flow path and a member located outside the mold with a gap between the mold and the member from the first layer, a step of providing a second layer so that the second layer fills the gap and covers the mold and the member located outside the mold with the gap between them, a step of forming an ejection orifice forming member for forming an ejection orifice from the second layer, a step of removing the member located outside the mold with the gap between them, and a step of forming a wall member located outside the ejection orifice forming member with at least a partial gap between the ejection orifice forming member and the wall member.

主权项

1. A manufacturing method of a liquid ejection head including a flow path connected to an ejection orifice that ejects liquid, the manufacturing method comprising:
a step of preparing a substrate including a first layer; a step of forming a flow path mold for forming the flow path and a member located outside the mold with a gap between the mold and the member from the first layer; a step of providing a second layer so that the gap is filled with the second layer and the second layer covers the mold and the member located outside the mold with the gap between the mold and the member; a step of forming an ejection orifice forming member for forming an ejection orifice from the second layer; a step of removing the member located outside the mold with the gap between the mold and the member; and a step of forming a wall member located outside the ejection orifice forming member with at least a partial gap between the ejection orifice forming member and the wall member, in this order.