| 发明名称 |
METHOD OF FABRICATING NANOTIPS WITH CONTROLLED PROFILE |
| 摘要 |
A nanotip, is fabricated by modifying a precursor nanotip having an apex and a shank by applying an electric field in the presence of a reactive gas to perform field-assisted etching wherein atoms are preferentially removed from the shank by chemical interaction with the reactive gas, and controlling the reactive gas pressure and/or tip voltage to vary the electric field so as to promote field evaporation of apex atoms during fabrication of the nanotip and thereby control the overall profile of the resulting nano-tip. The method permits shaping of the overall tip profile. |
| 申请公布号 |
US2014231379(A1) |
申请公布日期 |
2014.08.21 |
| 申请号 |
US201214346752 |
申请日期 |
2012.09.26 |
| 申请人 |
NATIONAL RESEARCH COUNCIL OF CANADA ;THE GOVERNORS OF THE UNIVERSITY OF ALBERTA |
发明人 |
Pitters Jason L.;Urban Radovan;Wolkow Robert A. |
| 分类号 |
B44C1/22 |
主分类号 |
B44C1/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of fabricating a nanotip, comprising:
modifying a precursor nanotip having an apex and a shank by applying an electric field in the presence of a reactive gas to perform field-assisted etching wherein atoms are preferentially removed from the shank by chemical interaction with the reactive gas; and controlling the reactive gas pressure and/or tip voltage to vary the electric field so as to promote field evaporation of apex atoms during fabrication of the nanotip and thereby control the overall profile of the resulting nanotip. |
| 地址 |
Ottawa CA |
