VACUUM PUMP

摘要

The present invention relates to a vacuum pump (10) comprising a regenerative pumping mechanism (12) and a drag pumping mechanism (14). The regenerative pumping mechanism (12) comprises a generally disc-shaped member (16) mounted on an axial shaft (8) for rotation relative to a stator (20) of the regenerative pumping mechanism. The drag pumping mechanism (14) comprising a generally cylindrical-shaped member (22) mounted at an outer circumferential portion (24) of the disc-shaped member (16) for rotation about the axial shaft (18) relative to a stator of the drag pumping mechanism.