GUIDE PATTERN DATA CORRECTING METHOD, PATTERN FORMING METHOD, AND COMPUTER READABLE RECORD MEDIUM

摘要

According to one embodiment, a guide pattern data correcting method is for correcting guide pattern data of a physical guide for formation of a polymer material to be microphase-separated. The physical guide has a plurality of concave portions in the guide pattern data, and at least two concave portions out of the plurality of concave portions are connected to each other. The guide pattern data is subjected to correction by shifting or rotation of at least either of the two connected concave portions.

主权项

1. A guide pattern data correcting method for correcting guide pattern data of a physical guide for formation of a polymer material to be microphase-separated, wherein
the physical guide has a plurality of concave portions in the guide pattern data, at least two concave portions out of the plurality of concave portions are connected to each other, and the guide pattern data is subjected to correction by shifting or rotation of at least either of the two connected concave portions.