发明名称 P-DOPING OF GROUP-III-NITRIDE BUFFER LAYER STRUCTURE ON A HETEROSUBSTRATE
摘要 The invention relates to an epitaxial group-ill-nitride buffer-layer structure (100) on a heterosubstrate, wherein the buffer-layer structure (100) comprises at least one stress- management layer sequence S including an interlayer structure (530) arranged between and adjacent to a first and a second group-ill-nitride layer (120, 140), wherein the inter¬layer structure (530) comprises a group-ill-nitride interlayer material having a larger band gap than the materials of the first and second group-ill-nitride layers (120, 140), and wherein a p-type-dopant-concentration profile drops, starting from at least 1 x1018 cm-3, by at least a factor of two in transition from the interlayer structure (530) to the first and second group-ill-nitride layers (120, 140).
申请公布号 WO2014125092(A1) 申请公布日期 2014.08.21
申请号 WO2014EP52957 申请日期 2014.02.14
申请人 TARKOTTA, GUNTER 发明人 LUTGEN, STEPHAN;MURAD, SAAD;CHITNIS, ASHAY
分类号 C30B25/18;C30B29/40;H01L21/02;H01L29/267 主分类号 C30B25/18
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