发明名称 SILICON PLATE IMPURITY REMOVING METHOD USING WATER JET
摘要 In the context of the production of silicon ingots for solar cell, the present invention relates to technology for removing and reusing impurities from a silicon dissolution process by using a water jet in a site comprising the impurities. To this end, the silicon plate impurity removing method of the present invention entails immersion in water up to the upper surface of a silicon plate comprising impurities constituted by portions cut from a polycrystalline silicon block, and, in this state, removing the impurities by using a water jet; the water sprayed from the water jet comprising an abrasive.
申请公布号 WO2014126284(A1) 申请公布日期 2014.08.21
申请号 WO2013KR01273 申请日期 2013.02.18
申请人 CLEANSOLUTION CO., LTD. 发明人 HAN, SEOUNG-HUK
分类号 H01L21/302;H01L21/301 主分类号 H01L21/302
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