| 主权项 |
1. A brush for cleaning of substrates following chemical mechanical polishing of the substrates, the brush having a cylindrical base having an axis with a pair of ends, the cylindrical shape extending from end to end, and a plurality of nodules extending from the cylindrical base and being unitary therewith, the brush having an intended direction of rotation whereby each nodule has a forward side and a rearward side, the cylindrical base and nodules comprising a unitary porous foam structure, the plurality of the nodules each having a shape that is asymmetrical with respect to a radially and axially extending plane extending centrally through each respective nodule and through the axis of the cylindrical base. |
