发明名称 |
METHOD OF ELECTRON BEAM DIFFRACTION ANALYSIS |
摘要 |
A method is provided for analysing electron backscatter diffraction data generated from a sample material. An image data set representative of an image of electron backscatter diffraction bands is obtained from the sample material. A set of estimated first diffraction parameters is then generated, these defining individual electron backscatter diffraction bands in the image data set. A candidate phase is then selected together with a respective orientation for the material,based upon the generated set of estimated parameters thereby identifying diffraction bands in the image data set. Second diffraction parameters of the identified diffraction bands are simulated for the candidate phase according to the respective orientation. These second diffraction parameters are then adjusted for the identified simulated bands so as to fit the simulated bands to the bands in the image data. A fitted orientation for the candidate phase is then calculated together with a corresponding fitting parameter defining the quality of fit. |
申请公布号 |
WO2014125295(A1) |
申请公布日期 |
2014.08.21 |
申请号 |
WO2014GB50444 |
申请日期 |
2014.02.14 |
申请人 |
OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED |
发明人 |
PENMAN, CHARLES;SCHMIDT, NIELS-HENRIK;THOMSEN, KNUD |
分类号 |
G01N23/203 |
主分类号 |
G01N23/203 |
代理机构 |
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代理人 |
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地址 |
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