Processing thermally conductive workpiece, comprises roughening a surface of thermally conductive workpiece, and heat-treating thermally conductive workpiece in chalcogen-containing atmosphere so that absorption of workpiece is increased

摘要

Processing (1100) thermally conductive workpiece, comprises (a) roughening (1102) at least one surface of the thermally conductive workpiece, and (b) heat-treating (1104) the thermally conductive workpiece in a chalcogen-containing atmosphere so that absorption of the thermally conductive workpiece is increased. Independent claims are also included for: (1) a cooling arrangement for a vacuum arrangement, comprising a thermally conductive workpiece having at least one roughened surface, a chalcogen-containing layer on the roughened surface of the thermally conductive workpiece, and a cooling system thermally coupled with the thermally conductive workpiece; and (2) a vacuum arrangement comprising a vacuum chamber having a connection for a vacuum pump, and at least one above cooling arrangement.