发明名称 SHEET PEELING DEVICE AND PEELING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a sheet peeling device which inhibits rising of a plate-like member when an adhesion sheet is peeled, and to provide a peeling method.SOLUTION: A sheet peeling device 1 comprises: application means 3 which applies a peeling tape PT to an adhesion sheet AS applied to one surface of a plate-like member WF; moving means 5 which relatively moves the plate-like member WF and the peeling tape PT to peel the adhesion sheet AS from the plate-like member WF; and pressing means 6 which presses the one surface of the plate-like member WF which is exposed after the adhesion sheet AS is peeled.
申请公布号 JP2014150232(A) 申请公布日期 2014.08.21
申请号 JP20130019806 申请日期 2013.02.04
申请人 LINTEC CORP 发明人 NAKADA MIKI;TAKANO TAKESHI;YOSHIOKA TAKAHISA
分类号 H01L21/683;H01L21/304 主分类号 H01L21/683
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