| 摘要 |
PROBLEM TO BE SOLVED: To provide an infra-red light source element capable of increasing the output efficiency of infrared ray.SOLUTION: The infra-red light source element includes: a substrate 1 which has a vacant portion 10 with an upper face opened in a part thereof; plural beam parts 22a-22d each supported by the substrate 1 at one end thereof; a thin film 23 supported by the respective another ends of the beam parts 22a-22d above the opening of the vacant portion 10; a heater part 31 formed on the upper face of the thin film 23 to generate the heat by receiving the power; a protection film 4 formed to cover the surface of the heater part 31; a vacant portion 50 with the lower face opened in a part thereof; and a lens portion 51 that upwardly collects infrared ray generated by the heat of the heater part 31. The infra-red light source element also includes a cap part that seals the beam parts 22a-22d, the thin film 23, the heater part 31, and the protection film 4 with the vacant portion 10 and the vacant portion 50. |
