CLOUD-BASED ARCHITECTURE FOR ANALYSIS AND PREDICTION OF INTEGRATED TOOL-RELATED AND MATERIAL-RELATED DATA AND METHODS THEREFOR

摘要

Cloud-based integrated yield/equipment data processing system for collecting and analyzing integrated tool-related data (cause data) and material-related data (effect data) pertaining to at least one material processing tool and at least one material is disclosed. In an embodiment, the tool-related data is correlated with the material-related data and the correlated tool-related data and material-related data is employed by logic to perform, using a cloud computing approach, at least one of root-cause analysis, prediction model building and tool control/optimization.

主权项

1. A cloud-based integrated yield/equipment data processing system for collecting and analyzing integrated tool related data and material-related data pertaining to at least one material processing tool and at least one material, comprising:
at least a first module for collecting said tool-related data pertaining to said at least one material processing tool: at least a second module for collecting said material-related data pertaining to said at least one material: first logic for correlating said tool-related data with said material-related data, thereby obtaining correlated tool-related data and material-related data and second logic for analyzing said correlated tool-related data and material-related data to perform at least one of root-cause analysis, prediction model building and tool control/optimization, wherein at least one of said first logic, and said second logic is implemented using a cloud computing approach.