ACOUSTIC WAVE DEVICE AND ELECTRONIC APPARATUS INCLUDING SAME

摘要

An acoustic wave device includes a piezoelectric substrate, an IDT electrode including plural electrode fingers disposed above an upper surface of the piezoelectric substrate, a first dielectric film made of oxide disposed above the upper surface of the substrate for covering the electrode fingers, and a second dielectric film made of non-oxide disposed on upper surfaces of the electrode fingers and between the first dielectric film and each of the electrode fingers. The first dielectric film contacts the upper surface of the piezoelectric substrate at a position between electrode fingers out of the plural electrode fingers adjacent to each other. The acoustic wave device prevents the electrode fingers of the IDT electrode from corrosion.

主权项

1. An acoustic wave device comprising:
a piezoelectric substrate having an upper surface; an interdigital transducer (IDT) electrode disposed above the upper surface of the piezoelectric substrate, the IDT electrode including a plurality of electrode fingers configured to excite a main acoustic wave; a first dielectric film made of oxide disposed above the upper surface of the piezoelectric substrate, the first dielectric film covering the plurality of electrode fingers; and a second dielectric film made of non-oxide disposed on upper surfaces of the plurality of electrode fingers and between the first dielectric film and each of the plurality of electrode fingers, wherein the first dielectric film contacts the upper surface of the piezoelectric substrate at a position between electrode fingers out of the plurality of electrode fingers adjacent to each other.