MICRO-ELECTRO-MECHANICAL DEVICE WITH BURIED CONDUCTIVE REGIONS, AND MANUFACTURING PROCESS THEREOF

摘要

A MEMS device formed by a body; a cavity, extending above the body; mobile and fixed structures extending above the cavity and physically connected to the body via anchoring regions; and electrical-connection regions, extending between the body and the anchoring regions and electrically connected to the mobile and fixed structures. The electrical-connection regions are formed by a conductive multilayer including a first semiconductor material layer, a composite layer of a binary compound of the semiconductor material and of a transition metal, and a second semiconductor material layer.

主权项

1. A MEMS device comprising:
a body; a cavity above the body; first and second anchoring regions; a mobile structure above the cavity and coupled to the body by the first anchoring regions; a fixed structure above the cavity and coupled to the body by the second anchoring regions; first and second electrical-connection regions between the body and the first and second anchoring regions, respectively, the first electrical-connection region being electrically coupled to the mobile structure and the second electrical-connection region being electrically coupled to the fixed structure, wherein the first and second electrical-connection regions have a conductive multilayer that includes a first semiconductor material layer, a composite layer of a binary compound of a semiconductor material and of a transition metal, and a second semiconductor material layer.