| 摘要 |
The present invention relates to a deposition apparatus and a manufacturing method of an organic light emitting display device using the same. According to the present invention, the deposition apparatus includes a chamber; a substrate mounting part which is located inside the chamber and includes a substrate mounted thereon; and a sputter part which forms a thin film on the substrate. The sputter part includes a first target part and a second target part, which are arranged to face each other. A pair of targets is mounted on each of the first target part and the second target part. Between the pair of the targets, argon gas can be directly charged. Thereby, plasma can be more effectively and stably formed. |
