Method of cleaning an optical measurement probe

摘要

The method involves using optical element for focusing or collimating an optical measuring beam (21) to the measuring point (31) of the surface (32) facing the measurement object (30). The compressed air is made to flow out of the probe measurement head (20) onto the surface of measuring object in the region of the measuring point or on light exit window of focus unit or a focusing lens of the probe measurement head. An independent claim is included for optical probe used as component of optical measuring device used for detecting shape of distance of roughness or vibration of surfaces of targets.