| 发明名称 |
PUSHING APPARATUS FOR TEST HANDLER |
| 摘要 |
The present invention relates to a pressurizing device for a test handler. The present invention has an advantage of using both liquid pressure and a duct by pressurizing a pusher with required pressure using an air cylinder in a structure of supplying temperature-controlled air through an air supply hole of the pusher using the duct. |
| 申请公布号 |
KR20140101456(A) |
申请公布日期 |
2014.08.20 |
| 申请号 |
KR20130013988 |
申请日期 |
2013.02.07 |
| 申请人 |
TECHWING CO., LTD. |
发明人 |
NA, YUN SUNG;NOH, JONG KI;SON, MIN SOO |
| 分类号 |
G01R31/26;H01L21/66 |
主分类号 |
G01R31/26 |
| 代理机构 |
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代理人 |
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| 主权项 |
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