发明名称 |
Tangential fan with cutoff assembly and vibration control for electric discharge laser |
摘要 |
<p>An electric discharge laser apparatus including a tangential fan comprising a laser chamber comprising a laser gas, at least two longitudinal electrodes configured to produce electric discharges defining a discharge region in said gas, a tangential fan for circulating said laser gas said fan defining a rotation axis and a circumference substantially concentric with said rotation axis and fan structure comprising a plurality of blade members disposed proximate to said circumference, a plurality of hub members supporting said blade members and defining fan blade segments, characterized by said blade members and said hub members being machined as a monolithic unit from a single blank of a selected material.
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申请公布号 |
EP1936761(A3) |
申请公布日期 |
2014.08.20 |
申请号 |
EP20080001621 |
申请日期 |
1999.08.04 |
申请人 |
CYMER, INC. |
发明人 |
HOFFMANN, THOMAS;HOWEY, JAMES K.;SHANNON, ROBERT A. |
分类号 |
H01S3/22;G03F7/20;H01S3/036;H01S3/225 |
主分类号 |
H01S3/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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