发明名称 Tangential fan with cutoff assembly and vibration control for electric discharge laser
摘要 <p>An electric discharge laser apparatus including a tangential fan comprising a laser chamber comprising a laser gas, at least two longitudinal electrodes configured to produce electric discharges defining a discharge region in said gas, a tangential fan for circulating said laser gas said fan defining a rotation axis and a circumference substantially concentric with said rotation axis and fan structure comprising a plurality of blade members disposed proximate to said circumference, a plurality of hub members supporting said blade members and defining fan blade segments, characterized by said blade members and said hub members being machined as a monolithic unit from a single blank of a selected material. </p>
申请公布号 EP1936761(A3) 申请公布日期 2014.08.20
申请号 EP20080001621 申请日期 1999.08.04
申请人 CYMER, INC. 发明人 HOFFMANN, THOMAS;HOWEY, JAMES K.;SHANNON, ROBERT A.
分类号 H01S3/22;G03F7/20;H01S3/036;H01S3/225 主分类号 H01S3/22
代理机构 代理人
主权项
地址