| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample holder for an electron microscope which has a function of observing a reaction process with gas by jetting gas atmosphere while heating a sample, and is capable of observing the reaction process of the sample in the gas atmosphere in constant concentration at a constant temperature, with no gas, that has been jetted once, returning to the sample. SOLUTION: The electron beam device and the gas reaction sample holder for an electron microscope includes a sample support frame 42 in which an opening 43 to let electron beam pass through is formed, a sample support wire 16 stretched to cross the near center of the opening 43, connection wires 33 and 34 connected to both ends of the sample support wire 16, and a conduit 17A which is attached to the sample support frame 42 that jets gas to the sample support wire 16, to face the sample support wire 16. A surface of a connection frame 42C receives the gas that has passed the sample support wire 16 after generated from a nozzle 17B at the tip end of the conduit 17. The surface is provided with an inclined surface which recesses from the advancement direction of the gas and provided with a plurality of parallel grooves. COPYRIGHT: (C)2013,JPO&INPIT |
