| 摘要 |
PROBLEM TO BE SOLVED: To provide a supporting device/method and a transfer device/method which can suppress the deflection of a plate-like member regardless of a supporting attitude and a transferring operation of the member. SOLUTION: The transfer device 1 for a plate-like member W having an adhesive sheet MS attached thereon comprises: a holding means 2 for holding the plate-like member W through the adhesive sheet MS; a face position keeping means 6 for energizing the plate-like member W held by the holding means 2 and keeping the face position of the plate-like member W at a predetermined position; and a moving means 3 for moving the holding means 2. The face position keeping means 6 can keep the face position of the plate-like member W regardless of the supporting attitude and the transferring operation of the plate-like member W by energizing the plate-like member W to one side or the other side. COPYRIGHT: (C)2012,JPO&INPIT |
