| 摘要 |
A crystal device and sealing method thereof are provided to air-tightly package the sealing piezoelectric device with adequate bond strength. Conductive metal films (9, 10) on upper and lower faces of outer frame (6) of middle crystal board (2) with an integrally formed crystal vibration sheet (5) is coated by metal paste sealing materials concocted by metal powder with 0.1 to 1.0 um of average particle size composed of Au, organic solvent and cellulose retinoid resin with the proportion of 88-93%, 5-15%, 0.01-4.0% by weight, and which are heated at a low temperature to perform primary sintering process. After forming primary sintering body with porous structure that young modulus is 9-18GPa and density is 10-17g/cm3, the metal films (14, 15, 17) of these base plates contact the primary sintering bodies of upper and lower faces of outer frame are heated and pressurized to perform secondary sintering process on the upside and downside substrates (3, 4) at the upper and lower laminations of the middle crystal plate. The meal particles of the primary sintering body are made to compactly re-crystallize to form joining films (25-27), thereby being air-tightly joined and sealed for package. |
