| 摘要 |
PROBLEM TO BE SOLVED: To enhance an operation rate of a device by shortening the operation stop period of the device in a maintenance work. SOLUTION: In a method for the antenna exchange, the interior of a plurality of vacuum chambers 1 and an element carrying chamber 150 is evacuated. An array antenna unit 30 is stored into an antenna carrying chamber 200. The interior of the antenna carrying chamber 200 is evacuated. Then the interior of the antenna carrying chamber 200 and the vacuum chamber 1 is communicated while keeping both chambers in vacuum. Between the two chambers, while keeping communicated and evacuated, the array antenna unit 30 is introduced from the antenna carrying chamber 200 to the vacuum chamber 1. The array antenna unit 30 is mounted in the vacuum chamber 1 in such a manner that each of electrode rods of the array antenna unit 30 which is introduced into the vacuum chamber 1 is connected with each of plural connectors which are connected to a high-frequency source electrically. COPYRIGHT: (C)2012,JPO&INPIT |
