发明名称 DEPOSITION APPARATUS
摘要 A deposition apparatus is provided that includes a plurality of line-type evaporation sources provided to be arranged in a predetermined direction; and a movement and support device which supports the plurality of line-type evaporation sources so as to be individually movable in the arrangement direction and/or longitudinal direction of the evaporation sources.
申请公布号 KR101431043(B1) 申请公布日期 2014.08.20
申请号 KR20080038671 申请日期 2008.04.25
申请人 发明人
分类号 C23C14/24;H01L51/56;H05B33/10 主分类号 C23C14/24
代理机构 代理人
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