| 摘要 |
FIELD: measurement equipment.SUBSTANCE: scanning probe microscope includes the first and second probes for scanning of a sample when maintaining distance to surface of a sample, quartz resonators retaining each of the first and second probes, and a modulating generator to ensure vibration of certain frequency of the first probe, which differs from resonant frequency of each quartz resonator. A control unit controls vibration of certain frequency of the first and second probes, detects proximity of the first probe and the second probe to each other on the basis of variation of certain frequencies and controls the drive of the first and second probes.EFFECT: prevention of collisions of the first and second probes during their movement.15 cl, 45 dwg |
